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发明名称
摘要
申请公布号
JP3122526(B2)
申请公布日期
2001.01.09
申请号
JP19920153767
申请日期
1992.06.12
申请人
发明人
分类号
H01L21/205;H01S5/00;(IPC1-7):H01L21/205
主分类号
H01L21/205
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