发明名称 Method for analyzing electrical contact between two conductive members of semiconductor device without destruction thereof
摘要 A Schottky contact of a heterojunction field effect transistor is expressed by a set of regional elements each representative of a line or a region of said Schottky contact, and current components respectively passing through the regional elements are expressed aswhere I is a gate current current, Rk is a length of the line or an area of the region, N is equal to or greater than 3 and Jk is a current density of one of the current components so that an analyst checks the current components to see whether or not the Schottky contact has a trouble.
申请公布号 US6172513(B1) 申请公布日期 2001.01.09
申请号 US19990260050 申请日期 1999.03.02
申请人 NEC CORPORATION 发明人 CONTRATA WALTER
分类号 G01R27/20;G01R31/26;G01R31/27;G01R31/28;(IPC1-7):G01R31/28 主分类号 G01R27/20
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