Chamber liner for semiconductor process chambers,申请号US09/163722-传众专利搜索

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发明名称	Chamber liner for semiconductor process chambers
摘要
申请公布号	US6170429(B2)	申请公布日期	2001.01.09
申请号	US09/163722	申请日期	1998.09.30
申请人		发明人
分类号		主分类号
代理机构		代理人
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