| 摘要 |
PROBLEM TO BE SOLVED: To reduce the initial investment by forming a transfer module in a cluster system capable of consistently executing a plurality of processings, by forming a movable part in a transfer chamber of a housing capable of being increased and defining the transfer chamber, and connecting a transfer part for transferring a body to be processed, to the movable body. SOLUTION: A transfer module is formed by connecting an air supply device 56 and an exhaust device 58 to a housing 52 capable of defining a transfer chamber TC, having an approximately rectangular cross section, and capable of being increased, and mounting a transfer device 60 consisting of a robot 61, a connecting part 62, a transfer arm 63 and an end effector 64. On the other hand, a processing module 80 is formed by mounting a number of nude- type turbo molecular pumps 88 in a housing 82 defining a processing chamber PC, and mounting a susceptor, a pulse oscillator, a reaction gas supply system, an electrode and the like. A wafer W is transferred from the transfer chamber TC to the processing chamber PC by the operation of the transfer device 60 while controlling the pressure adjustment in each chamber by a pressure adjusting mechanism including the air supply devices 56, 86 and the exhaust device 58. |
