Method of making integrated hybrid silicon-based micro-actuator devices

摘要

A method of making micro-actuator devices including a silicon wafer, a magnet positioned inside an insulated actuating chamber having electrical coil wound around its circumference thereby forming an electromagnet assemblage. A plurality of etched holes in silicon wafer receives the electromagnet assemblage and is adapted to produce a magnetic field in response to an applied current that acts on the magnet to cause the axial reciprocating motion of the magnet.