发明名称 Method of effecting a precision saw-toothed grinding on the surface of a given workpiece
摘要 Disclosed is an improved method of forming a series of hills and valleys alternately arranged at a predetermined pitch on the surface of a given workpiece. It comprises the steps of: carrying out a first grinding on the workpiece with a saw-toothed grindstone having a series of hills and valleys alternately arranged at "N" pitches ("N" being two or more integer or whole number), the height measured from the bottom of the valley to the peak of the hill in the saw-toothed grindstone being taller than the corresponding height in the workpiece; moving the saw-toothed grindstone and/or the workpiece one pitch relative to each other to carry out a second grinding on the workpiece; and repeating the relative movement of one-pitch long-distance and sequential grinding until the final "N"th grinding has been finished. All grindings are effected while the workpiece is being cooled by cooling water.
申请公布号 US6171176(B1) 申请公布日期 2001.01.09
申请号 US19990395174 申请日期 1999.09.14
申请人 DISCO CORPORATION 发明人 KAJIYAMA KEIICHI;SEKIYA KAZUMA
分类号 B24B13/00;B24B13/01;B24B19/02;H01L21/304;(IPC1-7):B24B1/00 主分类号 B24B13/00
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