摘要 |
The present invention disclosed the test cell and method of analyzing using the same which can analysis the cause of degradation of flash EEPROM cell in connection with programming, erasing or reading operation. The test cell comprises a first unit cell consisted of a drain, a source and a floating gate, a control gate; a second unit cell consisted of a drain, a source and a floating gate, control gate formed integrally with the floating gate and control gate of the first unit cell, respectively; and a third unit cell consisted of a drain, a source and a floating gate, a control gate formed integrally with the floating gate and control gate of the first unit cell, respectively.
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