| 摘要 |
PROBLEM TO BE SOLVED: To enable vacuum steam finish cleaning conforming to the speed of a pretreatment cleaning mechanism and to improve an object cleaning speed by arranging vacuum steam cleaning mechanisms which are connected to the pretreatment cleaning mechanism and use a combustible solvent. SOLUTION: Objects 8 to be cleaned such as electronic parts are charged into a pretreatment cleaning mechanism 1, subjected to immersion cleaning, transferred to another pretreatment cleaning mechanism 10, and ejection-cleaned by ejecting a cleaning liquid from an ejection nozzle 15 to complete pretreatment cleaning. Next, the objects 8 are transferred to a vacuum steam cleaning mechanism 16, in which a solvent recovery vacuum mechanism 25 is actuated, and piping 26 is deaerated, heating is done by a heating element 24 to generate steam, and steam-cleaning is done. During steam cleaning, the objects 8 after the completion of pretreatment cleaning in each pretreatment cleaning mechanism 1, 10 are classified, transferred in turn to other vacuum steam cleaning mechanisms 17, 18 and finish-cleaned.
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