发明名称 Methods of producing doped semiconductors
摘要 Methods for producing doped polycrystalline semiconductors and for producing doped monocrystalline semiconductors from predoped monocrystalline and polycrystalline semiconductors. The methods for producing doped polycrystalline semiconductors may include (1) providing a reactor for chemical vapor deposition, (2) creating a vapor within the reactor that includes a silicon compound and a preselected dopant, and (3) providing a substrate, exposed to the vapor, onto which the silicon and the dopant in the vapor are deposited to form doped polycrystalline silicon. The methods for producing doped monocrystalline semiconductors may include (1) selecting a first amount of a first semiconductor, the first semiconductor having a first concentration of the dopant, (2) selecting a second amount of a second semiconductor, and (3) using the first and second amounts to grow a monocrystalline semiconductor having a preselected concentration of the dopant.
申请公布号 US6171389(B1) 申请公布日期 2001.01.09
申请号 US19980163858 申请日期 1998.09.30
申请人 SEH AMERICA, INC. 发明人 ANDERSON DOUGLAS G.
分类号 C30B11/04;C30B13/10;C30B15/04;H01L21/205;(IPC1-7):C30B9/04 主分类号 C30B11/04
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