发明名称 CLEANING TANK
摘要 PROBLEM TO BE SOLVED: To keep the jet of a cleaning liquid almost uniform over the entire length of a nozzle by changing the size of an ejection opening of the nozzle to be larger on the cleaning liquid supply side and smaller on the tip side in the nozzle which is disposed approximately at the same height with the level of a cleaning tank and passes the cleaning liquid along the level. SOLUTION: In a cleaning tank 10, a cleaning liquid overflows from the notch 12 of an upper part opening 11, and the overflow liquid is received by an L-shaped receiver 13. A nozzle 16 is disposed at a position opposite to the notch 12 and generates a cleaning liquid flow on the level of the cleaning tank. The nozzle 16 is molded in the shape of a slender square cylinder, a lot of ejection openings 17 are bored longitudinally in one side surface, and a water supply pipe 18 is connected to one end part. The size of each ejection opening 17 is increased gradually on the side of the water supply pipe 18 and decreased gradually on the tip side. In this way, the ejection strength of the cleaning liquid ejected from each ejection opening 17 is kept nearly uniform over the entire length of the nozzle 17.
申请公布号 JP2001000924(A) 申请公布日期 2001.01.09
申请号 JP19990177043 申请日期 1999.06.23
申请人 SONY CORP 发明人 SATO NOBUAKI;ISHIYAMA HIROSHI
分类号 B08B3/02;H01L21/304;(IPC1-7):B08B3/02 主分类号 B08B3/02
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