| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain a polishing slurry which prevents the production of noise associate with a polisher by mixing polishing grains of a specified size with water, an accelerator for chemically attacking a surface, and starch for diminishing the vibration of a polisher. SOLUTION: The polishing grains have a means size smaller than about 10μm, is suitably selected from a metal oxide, a metal nitride, a metal carbide, a metal boride, a silicon compound, and diamond, and advantageously is contained in an amount of about 30 to 80 wt.%. Advantageously, the starch is contained in an amount of about 0.1 to 40 wt.%, and can be selected from one made from barley, corn, potatoes, rice, sago, tapioca, wheat, and yucca. The accelerator for attacking a surface and for enhancing the rate of abrasive removal is selected from acetic acid, citric acid, hydrochloric acid, hydrofluoric acid, nitric acid, sulfuric acid, a metal nitrate, and a metal sulfate and, advantageously, it is contained in an amount of about 1 to 50 wt.%.</p> |
