| 摘要 |
PROBLEM TO BE SOLVED: To obtain a black film high in the effect of preventing the reflection and scattering of light by forming a film at least contg. titanium, fluorine and nitrogen. SOLUTION: Titanium as an evaporating sorce is placed at the inside of an evaporating source holding part 2. A space between a substrate 3 and a substrate holder 4 is applied with bias voltage to better the adhesion therebetween. The vacuum in a vacuum vessel 1 is controlled, gaseous argon for generating plasma is introduced from a gas introducing port 8, the vacuum is recontrolled, and arc discharge is generated on a space between a cathode part 12 and the evaporating source holding part 2. When arc discharge is generated, plasma is generated in the range of dotted lines and reaches the evaporating source holding part 2 while being converged by a permanent magnet 6 for plasma convergence, and titanium is melted and evaporated. When the same degree of vacuum is held, and gaseous carbon tetrafluoride and gaseous nitrogen are introduced from a reaction gas feed port 9 in a fixed mixing ratio, they are ionized at the time of passing through the inside of the plasma and reach a substrate 3 to form a black TiCFN film. It is suitable as a reflection prevention film for the inner wall, fixing member, or the like, of the lens barrel of optical parts.
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