AUTOMATIC GATE VALVE FOR A SEMICONDUCTOR PROCESSING EQUIPMENT

摘要

PURPOSE: An automatic gate valve for a semiconductor processing equipment is provided to increase a space usage percentage as the number of chambers increase by establishing the gate valve inside a housing of an automatic transfer apparatus, and to simplify maintenance of the equipment by simplifying a complicated operating structure of the gate valve while satisfying the function of the valve itself by a compact structure of the overall equipment. CONSTITUTION: An automatic gate valve for a semiconductor processing equipment comprises a driving shaft, a shutter, a link and an arm. The driving shaft transforms a straight line motion to a rotational motion, established inside a housing of an automatic transfer apparatus. The shutter is driven as one body with the driving shaft. The link presses the shutter by a revolving power of the driving shaft. The arm maintains a rotational center of the shutter.