METHOD OF MAKING A THINFILM MICROMIRROR ARRAY-ACTUATED

摘要

PURPOSE: A method of making a thin film micromirror array-actuated is provided to increase a reflection factor by making a post formation portion perform a light reflecting function. CONSTITUTION: The method of making a thin film micromirror array-actuated comprises forming a sacrifice layer(70) of a polysilicon or amorphous silicon material on an entire surface of an actuator(65) patterned by a pixel unit. An upper part on one end of the actuator(65), in which a post(75) is to be formed, is etched to expose one end of the actuator(65). A post formation material is deposited on the sacrifice layer(70) where the post formation portion is removed. An SiO2 layer is planarized until the surface of the sacrifice layer is exposed. A driving mirror(60) is formed by depositing and etching a driving mirror formation material on the post and the sacrifice layer.