SPINNER HAVING HEXAMETHYLDISILAZANE INJECTING UNIT

摘要

PURPOSE: A spinner having HMDS(HexaMethylDiSilazane) injecting unit is provided so that a sealed characteristic between a hot plate and a chamber can be enhanced by acting a force uniformly to a circumference of a chamber covering a hot plate. CONSTITUTION: After loading a wafer on a hot plate(42), a HMDS unit(40) come down, covers the hot plate(42) and coats on the wafer. A driving force for driving the HMDS unit(40) up and down is produced by an air cylinder included to an additional device. The HMDS unit(40) consists of two parts. One is a head part(46) for covering the hot plate(42) and the other is a head support unit(48). An end of the head support unit(48) is connected to an upper center of the head part(46). The head support unit(48) transmits a driving force to the head part(46) when moving the head part(46) up and down. A part of the head support unit(48) covers from the upper center of the head part(46) to the edge and the remnant part extends toward a vertical direction at the edge of the head part(46).