| 摘要 |
PURPOSE: A system for protecting stepper lens from pollution is provided, which prevents deterioration of the illumination intensity caused by pollution of the stepper lens in a stepper facility for photo process. CONSTITUTION: A system for protecting stepper lens from pollution comprises a chemical filter unit(36) for filtering ambient air being introduced; air feed pipes(42, 52) for supplying nitrogen dioxide gas and clean dry air, respectively; an integrated intermittent controller(70) for selectively intermitting the filtered ambient air, the nitrogen dioxide gas, and the clean dry air which are supplied through the chemical unit(36) and the air feed pipes(42, 52), respectively, according to a prespecified recipe; nozzles(NZ1 to NZn) provided on the ends of branch pipes which are branched from a common pipe(92) connected to a rear end of the integrated intermittent controller(70) in such a manner that injection directions thereof are directed to lens(L1, L2, L3, L4; RLa, RLb, RLc) of a stepper(2); and a compressor(80) for providing a discharge pressure of the exterior air, the nitrogen dioxide gas, and the clean dry air selectively passing through the integrated intermittent controller(70) at a desired value.
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