| 摘要 |
PURPOSE: A substrate aligner is provided to prevent scratch caused at a contact portion of a substrate and a pin by protrusively installing a ball bearing at a contacted portion with the substrate. CONSTITUTION: A substrate aligner comprises a table(101), pins(102a,102b), and vacuum chucks(104a,104b,104c). The pins(102a,102b) are installed so as to perform an up-and-down motion in a vertical direction on a top surface of the table(101). The vacuum chucks(104a,104b,104c) are fixed to the table(101). A projected ball bearing(6) is formed at each end of the pins(102a,102b). The first and second cylinders(103a,103b) are formed at both sides of the table(101). |
