发明名称 Sensor detecting carbon monoxide, nitrogen oxides, hydrocarbons, etc. for domestic or industrial use has electrically conductive metal oxide layer overlying heater on substrate
摘要 A gas sensor has two conductive strips for applying an electric signal to an electrically conductive metal oxide layer overlying an electrically insulating layer overlying a heater on a substrate. The strips partly overlap the oxide layer that is made from particles of the order of 20 nanometer diameter. An Independent claim is included for the following: (a) Manufacturing the above sensor by building up the heater, insulating layer and strips on the substrate. The oxide layer is formed by applying a colloidal metallic solution over the insulating layer and strips and then heating the solution. Preferred Features: A dielectric layer lies between the substrate and the heater.
申请公布号 FR2795821(A1) 申请公布日期 2001.01.05
申请号 FR19990008749 申请日期 1999.07.02
申请人 MICROCHEMICAL SYSTEMS S.A. 发明人 NAYRAL CELINE;CHAUDRET BRUNO;MAISONNAT ANDRE
分类号 G01N27/12;(IPC1-7):G01N27/12;H01L49/00 主分类号 G01N27/12
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