发明名称 |
Sensor detecting carbon monoxide, nitrogen oxides, hydrocarbons, etc. for domestic or industrial use has electrically conductive metal oxide layer overlying heater on substrate |
摘要 |
A gas sensor has two conductive strips for applying an electric signal to an electrically conductive metal oxide layer overlying an electrically insulating layer overlying a heater on a substrate. The strips partly overlap the oxide layer that is made from particles of the order of 20 nanometer diameter. An Independent claim is included for the following: (a) Manufacturing the above sensor by building up the heater, insulating layer and strips on the substrate. The oxide layer is formed by applying a colloidal metallic solution over the insulating layer and strips and then heating the solution. Preferred Features: A dielectric layer lies between the substrate and the heater.
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申请公布号 |
FR2795821(A1) |
申请公布日期 |
2001.01.05 |
申请号 |
FR19990008749 |
申请日期 |
1999.07.02 |
申请人 |
MICROCHEMICAL SYSTEMS S.A. |
发明人 |
NAYRAL CELINE;CHAUDRET BRUNO;MAISONNAT ANDRE |
分类号 |
G01N27/12;(IPC1-7):G01N27/12;H01L49/00 |
主分类号 |
G01N27/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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