MICROFABRICATED ELASTOMERIC VALVE AND PUMP SYSTEMS

摘要

A microfabricated elastomeric device comprises a planar substrate and a first elastomeric layer having a top surface and a bottom surface. The bottom surface comprises a first recess, wherein the bottom surface of the first elastomeric layer is bonded to the planar substrate such that the first recess forms a first flow channel. The device also comprises a second elastomeric layer having a top surface and a bottom surface. The bottom surface comprises a second recess. The bottom surface of the second elastomeric layer is bonded to the top surface of the first elastomeric layer such that the second recess forms a second flow channel. The first and second elastomeric layers form an elastomeric structure. The second flow channel extends across and above the first flow channel such that a fluid flow within the second flow channel is directed from before a first side of the first flow channel to beyond a second side of the first flow channel. A portion of the first elastomeric layer is a deflectable portion and is deflectable into the first flow channel upon pressurization of the second flow channel to form a planar sealing surface between the planar substrate and the deflectable portion of the first elastomeric layer.