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发明名称
Methode zum Transportieren von Substraten mit plattenförmiger Grundlage
摘要
申请公布号
DE69132324(T2)
申请公布日期
2001.01.04
申请号
DE1991632324T
申请日期
1991.10.28
申请人
KABUSHIKI KAISHA WATANABE SHOKO, TOKIO/TOKYO
发明人
TODA, MASAYUKI;ONODA, TAKASHI;OHMI, TADAHIRO;UMEDA, MASARU;KANNO, YOICHI
分类号
B65G51/03;H01L21/677;(IPC1-7):H01L21/00
主分类号
B65G51/03
代理机构
代理人
主权项
地址
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