发明名称 |
Contactless torque sensor has layer of magnetoelastic material on shaft, sensor chip with integrated planar coils, ferromagnetic yoke and magnetic field sensitive components on substrate |
摘要 |
The sensor has a layer of magnetoelastic material (C) on a shaft whose permeability varies with torsion-related mechanical stress on the shaft surface. A sensor chip is used with integrated planar coils (Sp) for magnetic stimulation, a ferromagnetic yoke (J) for flux guidance and magnetic field sensitive components (MD, MU) on a substrate (Su). At least three ferromagnetic strips on the shaft side carry concentrators (K1-K3). The yoke and two concentrators are arranged at a small separation only in a region in which the magnetic field sensitive components are located. |
申请公布号 |
DE19929864(A1) |
申请公布日期 |
2001.01.04 |
申请号 |
DE1999129864 |
申请日期 |
1999.06.30 |
申请人 |
ACKER, HEINRICH |
发明人 |
ACKER, HEINRICH |
分类号 |
G01D5/14;G01L3/10;(IPC1-7):G01L3/10;G01D5/20 |
主分类号 |
G01D5/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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