LIGHT SOURCE DEVICE, SPECTROSCOPE COMPRISING THE LIGHT SOURCE DEVICE, AND FILM THICKNESS SENSOR

摘要

Light emitted from a white LED (12) is transmitted through a dichroir mirror (14) to extract a light in the phosphor emission region the central wavelength of which is 560 nm. Light emitted from a blue LED (13) is reflected from the dichroic mirror (14) to extract a blue light the central wavelength of which is 470 nm. The two lights from the LEDs (12, 13) are combined and outputted. The power of the light from the LED (12) the central wavelength of which is 560 nm and the peak power of the light from the LED (13) the central wavelength of which is 470 nm are equilized by adjusting the powers of the LEDs (12, 13).