Z-AXIS VIBRATORY GYROSCOPE

摘要

A microgyroscope having a suspended vertical post uses the Coriolis force to detect the rotation rate. The microgyroscope consists of a single vertical post (120) which senses the rotation rate. The vertical post is supported by multiple silicon suspensions (125). The vertical post is driven electrostatically to oscillat in-plane (x and y directions) by vertical capacitors (130). The Coriolis force induced motions of the vertical post is detected capacitively by the vertical capacitors.