METHOD FOR ACTIVATING NON-EVAPORABLE GETTER OF FIELD EMISSION DEVICE

摘要

PURPOSE: A method for activating non-evaporable getter for a FED(field emission device) is provided to improve inner vacuum degree of a FED by activating non-evaporable getter in a back chamber of a FED panel effectively and readily. CONSTITUTION: Non-evaporable getter for a FED is activated by heating a back chamber(3) of a FED panel(1) by a heating unit(5) at over a getter activation temperature 550°C during panel exhaustion. The FED panel(1) includes a top plate(6), a bottom plate(7), and a sealing line(9). The back chamber(3) accepts getter for enhancing vacuum degree of the inner space inside the panel(1). The back chamber(3) is attached to the bottom plate(7) of the FED panel(1) at the bottom of the exhausting hole inside a sealing line(9). The heating unit(5) is arranged on the exhausting part. The inner diameter of the heating unit(5) is large enough to accept the back chamber(3). The heating unit(5) may be an electric heater.