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发明名称
CHEMICAL MECHANICAL POLISHING SLURRY USEFUL FOR COPPER SUBSTRATES
摘要
申请公布号
EP1064338(A1)
申请公布日期
2001.01.03
申请号
EP19990912683
申请日期
1999.03.18
申请人
CABOT MICROELECTRONICS CORPORATION
发明人
KAUFMAN, VLASTA, BRUSIC;KISTLER, RODNEY, C.;WANG, SHUMIN
分类号
C09G1/02;C09K3/14;H01L21/304;H01L21/306;H01L21/321;(IPC1-7):C09G1/02
主分类号
C09G1/02
代理机构
代理人
主权项
地址
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