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发明名称
Process and device composite simulation system and simulation method
摘要
申请公布号
EP0631248(B1)
申请公布日期
2001.01.03
申请号
EP19940109825
申请日期
1994.06.24
申请人
NEC CORPORATION
发明人
TAMEGAYA, YUKIO
分类号
H01L29/00;G06F17/50;H01L21/00;(IPC1-7):G06F17/50
主分类号
H01L29/00
代理机构
代理人
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