发明名称 |
Control method of stocker entry task and stocker exit task in semiconductor wafer cassette transportation apparatus |
摘要 |
In a stocker entry task control method employed in a semiconductor wafer cassette transportation apparatus that has high transportation ability of a semiconductor wafer cassette, a host computer sends an interrogation to a stocker in which a semiconductor wafer cassette is to be stored whether there is an available storage site therein. The stocker ascertains the storage site if available. Then, the host computer sends a transportation task instruction to an inter-stocker transport device or an automatic carrier. Alternatively, an entry task instruction is sent to the stocker.
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申请公布号 |
US6169935(B1) |
申请公布日期 |
2001.01.02 |
申请号 |
US19980035920 |
申请日期 |
1998.03.06 |
申请人 |
MITSUBISHI DENKI KABUSHIKI KAISHA |
发明人 |
IWASAKI JUNJI;KATSUBE JUNICHI;ITAMI YASUSHI |
分类号 |
B65G1/00;B65G1/137;B65G49/07;G05D1/02;H01L21/00;H01L21/677;(IPC1-7):G06F7/00 |
主分类号 |
B65G1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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