发明名称 Laser ablation type ion source
摘要 A laser ablation type ion source including vacuum chambers provided with a retaining section for holding a solid raw material for the generation of ions, an ion extracting electrode, an ion accelerating electrode, and a mass spectrograph for ion separation. The ion source also includes a laser beam source for injecting a laser beam of high density into the vacuum chamber.
申请公布号 US6169288(B1) 申请公布日期 2001.01.02
申请号 US19980159510 申请日期 1998.09.24
申请人 AGENCY OF INDUSTRIAL SCIENCE & TECHNOLOGY, MINISTRY OF INTERNATIONAL TRADE & INDUSTRY 发明人 HORINO YUJI;MIHARA TOSHIYUKI;CHAYAHARA AKIYOSHI;KINOMURA ATSUSHI;TSUBOUCHI NOBUTERU
分类号 C23C14/32;C23C14/48;H01J27/24;H01J37/05;H01J37/08;H01J49/16;H01L21/265;(IPC1-7):H01J37/317 主分类号 C23C14/32
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