发明名称 |
Laser ablation type ion source |
摘要 |
A laser ablation type ion source including vacuum chambers provided with a retaining section for holding a solid raw material for the generation of ions, an ion extracting electrode, an ion accelerating electrode, and a mass spectrograph for ion separation. The ion source also includes a laser beam source for injecting a laser beam of high density into the vacuum chamber.
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申请公布号 |
US6169288(B1) |
申请公布日期 |
2001.01.02 |
申请号 |
US19980159510 |
申请日期 |
1998.09.24 |
申请人 |
AGENCY OF INDUSTRIAL SCIENCE & TECHNOLOGY, MINISTRY OF INTERNATIONAL TRADE & INDUSTRY |
发明人 |
HORINO YUJI;MIHARA TOSHIYUKI;CHAYAHARA AKIYOSHI;KINOMURA ATSUSHI;TSUBOUCHI NOBUTERU |
分类号 |
C23C14/32;C23C14/48;H01J27/24;H01J37/05;H01J37/08;H01J49/16;H01L21/265;(IPC1-7):H01J37/317 |
主分类号 |
C23C14/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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