| 摘要 |
An installation for protecting the outlet port of a stocking unit. The installation includes an outlet port having four wafer boat supporters, two wafer boat sensors and a set of light-intercepting sensors. Through the light-intercepting sensors and the wafer boat sensors, any improperly placed wafer boat or items inside the outlet port area can be detected. Hence, collisions between a wafer boat forwarded by the stocking unit and any wafer boat or items left inside the outlet is prevented.
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