发明名称 Detecting fields with a single-pass, dual-amplitude-mode scanning force microscope
摘要 A scanning probe microscope operates in the manner of an atomic force microscope during intermittent periods of scanning motion, in which a sample surface is driven so that a scan line on the surface is moved past a probe tip being vibrated in engagement with the surface. Between these intermittent periods of scanning motion, the vibrating probe tip is moved out of engagement with the sample surface, so that the amplitude and phase shift of probe tip vibrations are determined by the gradient of a force field extending outward from the sample surface. Such a force field is established when the probe tip is attracted by, or repelled from, a magnetic or electric field at or near the sample surface. For each sample point, the system stores data representing the height of the sample surface and the force field.
申请公布号 US6167753(B1) 申请公布日期 2001.01.02
申请号 US19990226830 申请日期 1999.01.07
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 CHEN DONG;FLECHA EDWIN;HAMMOND JAMES MICHAEL;ROESSLER KENNETH GILBERT
分类号 G01B7/34;G01B21/30;G01N37/00;G01Q60/34;G01R29/08;G01R31/303;G01R33/10;G01R33/12;(IPC1-7):G01B7/34 主分类号 G01B7/34
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