| 发明名称 |
Method and apparatus for automatically performing cleaning processes in a semiconductor wafer processing system |
| 摘要 |
A semiconductor wafer processing system with a multi-tasking sequencer control that performs an automatic cleaning process for the process chamber or chambers of the system.
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| 申请公布号 |
US6168672(B1) |
申请公布日期 |
2001.01.02 |
| 申请号 |
US19980036333 |
申请日期 |
1998.03.06 |
| 申请人 |
APPLIED MATERIALS INC. |
发明人 |
NGUYEN THU VAN |
| 分类号 |
B08B3/04;H01L21/00;(IPC1-7):B08B7/04;B08B3/00;B44C1/22 |
主分类号 |
B08B3/04 |
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