Angular velocity sensor and diagnosis system for this sensor

摘要

A drive circuit supplies a FB (feedback) signal having a predetermined frequency to drive electrodes to vibrate a vibrator. An angular velocity detecting circuit detects a vibratory movement caused in a direction normal to an oscillating direction of the vibrator based on a sensing signal of angular velocity sensing electrodes, thereby generating an angular velocity signal. A signal input circuit supplies a diagnostic signal having a frequency different from that of the FB signal, which is entered into the vibrator via diagnosing electrodes. A diagnosis circuit generates a breakdown signal based on a signal responsive to the diagnostic signal which is obtained from at least one of the drive electrodes and the angular velocity sensing electrodes.