CROSSLINKABLE ELASTOMER COMPOSITION AND MOLDED ARTICLE PRODUCED FROM THE COMPOSITION

摘要

A crosslinkable elastomer composition suitable for use as a molding material for semiconductor production apparatuses which has excellent mechanical properties, is reduced in the release of gases such as DOP, and is extremely clean. The composition comprises a crosslinkable elastomer ingredient and fine silicon oxide particles, which have on the surface thereof up to 100x10<19> hydroxyl groups per g, a dioctyl phthalate adsorption of up to 8 mu g per g of the silicon oxide, and an average particle diameter of 0.5 mu m or smaller.