| 摘要 |
<p>A carbon film which contains fluorine and hydrogen, and has, in a spectrum obtained by FT-IR (Fourier transform infrared) spectroscopy, a ratio (IR . C-F)/(IR . C-H) of the area (IR . C-F) of a peak of 1000 cm-1 to 1300 cm-1 being ascribed to a C-F bond to the area (IR . C-H) of a peak of 2800 cm-1 to 3100 cm-1 being ascribed to a C-H bond of a value greater than 0, and, in a spectrum obtained by XPS (X-ray photoelectron spectroscopy), a ratio (F¿1S? / C1S) of the intensity of a peak ascribed to F1S to that of a peak ascribed to C1S of a value greater than 0 and less than 3. A carbon film containing hydrogen and nitrogen. A carbon film containing hydrogen and at least one member selected from among a metal, a metal compound, silicon and a silicon compound.</p> |
