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发明名称
Magnetron-Zerstäubungs-Verfahren und -Gerät
摘要
申请公布号
DE69516747(T2)
申请公布日期
2000.12.28
申请号
DE19956016747T
申请日期
1995.03.03
申请人
THE BOC GROUP, INC.
发明人
SIECK, PETER A.;NEWCOMB, RICHARD;TRUMBLY, TERRY A.;SCHULZ, STEPHEN C.
分类号
H05H1/46;B01J19/08;C23C14/34;C23C14/35;C23C14/54;C23C14/56;C23C16/50;C23F4/00;H01J37/34;H01L21/203;H01L21/205;H01L21/285;(IPC1-7):H01J37/34
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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