METHOD AND APPARATUS FOR FORMING POLYCRYSTALLINE PARTICLES

摘要

Disclosed herein is a method and apparatus for forming polycrystalline particles by gas phase condensation employing arc plasma evaporation. The disclosed method and apparatus may be employed to form polycrystalline particles from high-melting temperature, low evaporation pressure materials such as transition metals. Arc discharge is sustained by the evaporated species, therefor, there is no need for plasma sustaining gas. Evaporation may be sustained from either the cathode or anode. A reaction gas may be provided to form products with the evaporated species.