A doped diamond-like carbon coating

摘要

The invention relates to a silicon-nitrogen doped diamond-like carbon coating. This coating type is characterised by a low surface energy, a high hardness and a good adhesion to the substrate. Such a layer functions as an excellent adhesion promoting layer for a diamond-like carbon composition coating. By repeated alternation of a doped diamond-like carbon layer and a diamond-like carbon composition layer, thick coatings with a good adherence to the substrate and with low internal stresses can be deposited.