EMITTER, EMITTER FABRICATING METHOD, AND COLD ELECTRON EMITTING DEVICE FABRICATING METHOD

摘要

A cold electron emitting device comprising an emitter fabricated by etching a columnar polycrystalline film (2) formed by growing columnar crystal grains (4) along the same crystal axis on a substrate (1). Even if multiple emitters are fabricated in such a cold electron emitting device, the uniformness of the shapes of the emitters is of good reproducibility, and the variation of electron emitting characteristic due to variation of the shapes of emitters is little, thereby fabricating a cold electron emitting device having a uniform emitting characteristic and formed on a large-area substrate.