Combination CVI/CVD and heat treat susceptor lid

摘要

The invention relates to a susceptor lid (30) for use in a CVI/CVD furnace. More specifically, the invention is directed to a lid configured to consecutively run CVI/CVD and heat treatment processes without opening the furnace. The susceptor lid according to the invention comprises: a susceptor lid body (100) having a gas exhaust hole (102), the susceptor lid body having a top surface (202) and a bottom surface (204); and an exhaust lid (206) disposed over the gas exhaust hole, with a clearance (200) between the exhaust lid and the gas exhaust hole such that exhaust gas pressure within the clearance is approximately equal to, or less than the exhaust gas pressure within the gas exhaust hole, the exhaust lid being positioned to block the majority of the radiation from below the bottom surface of the susceptor lid body. <IMAGE>