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发明名称
Chemical amplification type resist composition
摘要
申请公布号
GB0027168(D0)
申请公布日期
2000.12.27
申请号
GB20000027168
申请日期
2000.11.07
申请人
SUMITOMO CHEMICAL COMPANY LIMITED
发明人
分类号
G03F7/004;G03F7/039
主分类号
G03F7/004
代理机构
代理人
主权项
地址
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