Semiconductor factory automation system and method for controlling automatic guide vehicle

摘要

A method for controlling an automatic guide vehicle (AGV) 214 in a semiconductor factory automation (FA) system, includes the steps of: a) receiving operating mode information of a process equipment (EQ) 204 changed by an operator; b) storing the operating mode information of the process equipment changed in a real-time database 300; c) carrying out a predetermined semiconductor process at an operating mode having a full automation mode and sending a process completion signal after the predetermined semiconductor process has been completed, wherein the predetermined semiconductor process is applied to a lot of semiconductor wafers; d) creating a queue in response to the process completion signal; e) checking the operating mode information of the process equipment stored in the real-time database in response to the queue; f) inactivating the AGV by interrupting a transmission of the queue to the AGV if the operating mode information of the process equipment stored in the real-time database is not the full automation mode; and g) activating the AGV to unload the lot of semiconductor wafers from the process equipment in response to the queue if the operating mode information of the process equipment stored in the real-time database is the full automation mode. The method in accordance with the present invention can effectively control the AGV by checking operating mode information stored in a real-time database in order to inactivate the AGV in a semiconductor FA system, when an operating mode is changed from a full automation mode to another mode by a system operator.