Method for non-intermittent analysis of the optical layer thickness of coatings measures reflection or transmission on convex and concave spherical surfaces with photodiodes.

摘要

Coatings on both spherical surfaces of concave-convex lenses have different spherical radii (R1,R2). During the coating process a light beam impinges on each concave-convex lens off-centre. Reflection or transmission is measured on the convex (1) and concave (2) spherical surfaces with photodiodes (5,13). Each optical layer thickness is determined from the functional interrelationship between reflection or transmission and optical thickness of layers.