| 摘要 |
Process for monitoring growing layers comprises directing a measuring beam (7) before starting the layer growth into the coating chamber (9), preferably a galvanic bath, and onto a layer substrate. The coating chamber contains a transparent homogeneous medium, especially an electrolyte. The layer surface acts as a reflector which moves relative to the measuring device as a consequence of the layer growth so that the path which puts back the measuring beam between beam division and reunification with the reference beam (4) continuously changes; and from the number of intensity fluctuations determining the layer thickness as a function of time. Independent claims are also included for: (1) an optical scanning device; (2) a detector; (3) an optical receiving device; and (4) a measuring camera.
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