HIGH-TEMPERATURE BALANCE

摘要

A high-temperature balance includes a piezoelectric material, such as langasite (gallium phosphate (Ga PO4), a member of the (Al, Ga) N system), that are stable at high temperatures. The frequency response of the balance is monitored to determine the change in mass of material deposited on the balance in a high-temperature environment. Accordingly, the balance can be used to monitor high-temperature deposition rates or to perform thermogravimetric analysis. The high-temperature balance of this invention can further be operated as a nanobalance to measure monolayer changes in film thickness.