| 摘要 |
<p>A optical endpoint system for a CMP system with an optical viewport assembly (40) located off-center on the platen (4), the viewport being adjustable in height by height adjusting screws (57) so that the window (53) of the viewport can be made flush with the top of the polishing pad (7). Locking screws (58) maintain the vertical position of the window (53). An optical fiber bundle (31) is routed through the platen drive spool (8) to a rotary optical coupling (32).</p> |
