| 摘要 |
Lock has a gap (4) sealed by a sealing device. The sealing device is formed in the gap by a pump rotor pair (6,7,8,9) conveyed from the vacuum chamber to the atmosphere. Preferred Features: The rotor pair is formed by two roller pistons (10, 11), one piston (10) having little play opposite the wall (2) of the lock gap and the other piston (11) having little play opposite the foil.
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