| 摘要 |
optics. SUBSTANCE: the optical system has two components, one of which is made in the form of an apochromatic adapter having at least one collecting lens before the plane of objects, and the other in the form of a catadioptic lens. The catadioptic lens has two reflecting surfaces and at least one collecting lens before the plane of image. Parallel or close to it motion of beams is provided between the first and second components. One of the reflecting surfaces is made in the form of a concave mirror facing with the concavity the image plane, and other is positioned on the convex or concave side on the central part following the lens mirror facing with the concavity the image plane. Both reflecting surfaces are made spherical and concentric, or close to concentric, with the relation of radii equal to 2 to 2.5. The concave mirror has a central hole, whose diameter equals the diameter of the emergent bundle of beams of the apochromatic adapter. The lenses in both components may be made at least of two materials-quartz and fluorite, transparent in the ultraviolet spectral range of wavelengths within 193.0 to 365.0 nm. EFFECT: expanded functional capabilities of the system due to assurance of its functioning within a wide spectrum range at a high numerical aperture within 0.7 to 0.8. 4 cl, 4 dwg, 2 tbl
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