发明名称 Polishing slurry
摘要 The invention provides a mixture for polishing surfaces. The mixture includes polishing particles having an average size of less than 10 mu m and water. It also includes an accelerator for chemically attacking a surface and a starch for reducing vibration of polishing machines.
申请公布号 US6162268(A) 申请公布日期 2000.12.19
申请号 US19990303920 申请日期 1999.05.03
申请人 PRAXAIR S. T. TECHNOLOGY, INC. 发明人 KNAPP, JAMES KENT;KWOK, DORIS
分类号 B24B37/00;C09K3/14;C09K13/04;(IPC1-7):C23F1/14;C23F4/00 主分类号 B24B37/00
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