发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To feed a stable reference voltage to a drive circuit. SOLUTION: A reference voltage generating circuit, a wiring 109b which connects the reference voltage generating circuit to a drive circuit that outputs the inner voltage receiving a reference voltage, wirings 109a and 109c, a shielding wire provided to a lower layer 108 which interpose an insulating layer between them are provided, by which both the shielding wires are kept at a ground potential. Or a third shielding wire 106 and a fourth shielding wire 109 are provided to a second and a third wiring layer which are different from a first wiring layer, composed of a wiring 108b and two shielding wires 108a and 108c. By this setup, a semiconductor device can be protected against influence of noises due to other circuits inside a semiconductor chip or a coupling capacitor, so that a reference voltage can be supplied stably to a drive circuit.
申请公布号 JP2000353785(A) 申请公布日期 2000.12.19
申请号 JP20000139396 申请日期 2000.05.08
申请人 HITACHI LTD;HITACHI ULSI SYSTEMS CO LTD 发明人 HORIGUCHI SHINJI;AOKI MASAKAZU;ITO KIYOO;NAKAGOME YOSHINOBU;IKENAGA SHINICHI;ETO JUN;MIYAKE NORIO;NODA TAKAAKI;TANAKA HITOSHI
分类号 G11C11/401;H01L21/822;H01L21/8242;H01L27/04;H01L27/108 主分类号 G11C11/401
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