发明名称 ELECTRICALLY CONTROLLED ULTRA-MICROMANIPULATOR
摘要 An electrically controlled ultra-micromanipulator utilizes three sets of electrostrictive elements arranged in mutually perpendicular relationship and interconnected to selectively move a probe or other object in a three-dimensional pattern. In the disclosed embodiment, two sets of the electrostrictive elements establish pivotal movement about mutually perpendicular axes and the third set of electrostrictive elements establish linear movement in a direction perpendicular to the pivotal axes of the other two sets of elements. The elements establishing the linear movement are arranged in pairs adapted to flex in opposite directions upon an applied potential so that the probe or other object moves along a linear path.
申请公布号 US3835338(A) 申请公布日期 1974.09.10
申请号 US19730390846 申请日期 1973.08.23
申请人 MARTIN A,US 发明人 MARTIN A,US
分类号 B23Q1/36;B25J7/00;B25J9/10;H01L41/09;H04R17/08;(IPC1-7):H04R17/00 主分类号 B23Q1/36
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